Nanotechnology
Integrated Processing Systems for Ultra-precision and Ultra-fine products
ISBN13: 9780198562832ISBN10: 0198562837
Hardback,
424 pages
Aug 1996,
In Stock
Price:
$350.00 (06)Description
The manufacture of integrated circuits and opto-electronic devices, for example, calls for accuracies in the nanometer range (approximately three atomic lattice spacings). This book, written by leading researchers in Japan, examines the technology and systems needed to achieve this level of accuracy. The underlying concept of nanotechnology systems comes from the prediction that the extremely high accuracy required in materials processing will ultimately reach the order of 1nm (nanometer). Since the distance between lattice atoms is about 0.3nm, this constitutes the limit in resolution for measurable or confirmable lengths of solid materials. This leads directly to processing at the atomic bit level at which sub-nm resolution becomes necessary. Nanotechnology is concerned with integrated processing systems for measurement, position control, and processing technologies in the sub-nm range. It will be essential in the fabrication of extremely precise and fine parts.About the Author(s)
Edited by Norio Taniguchi, Professor Emeritus, Tokyo Science University, Japan
Associate Editors: Tsuguo Kohno, Professor, Tokyo Metropolitan Institute of Science and Technology, Japan, Kazuo Maruyama, Professor, Tokyo Institute of Technology, Japan, Kiyoshi Iizuka, Vice Chairman, Nikon Tsukuba Research Laboratory, Japan, Iwao Miyamoto, Assistant Professor, Tokyo Science University, Japan, and Toshio Dohi, Assistant Professor, National Saitama University
