Electrical & Computer Engineering
![[cover]](/images/covers/0190000000.gif)
Fabrication Engineering at the Micro and Nanoscale
Third Edition
$89.95
Paperback,
Aug 2007
ISBN13: 9780195320176ISBN10: 0195320174
Designed for courses in Semiconductor or Microelectronic Fabrication, this new 3rd edition provides a thorough and accessible introduction to all fields of micro and nanoscale fabrication.
![[cover]](/images/covers/0195320174.jpg)
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